Wet-strippable silicon-containing antireflectant
US10031420B2 · kind B2 · utility
13Cited by
16References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2016 |
| Grant date | Jul 24, 2018 |
| Priority date | — |
| Expiry date | Aug 11, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/32
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Wet-strippable antireflective compositions comprising one or more silicon-containing polymers that are free of Q-monomers and hydridosilanes as polymerized units are provided. These compositions are useful in the manufacture of various electronic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.