Patent · US Active

Platen support structure

US10032601B2 · kind B2 · utility

0Cited by
6References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 21, 2014
Grant dateJul 24, 2018
Priority date
Expiry dateDec 23, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/31701
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A platen support structure adapted to thermally insulate a heated platen portion from a cold base plate while providing substantially leak-free gas transport therebetween and while allowing thermal expansion and contraction of the platen portion. Various examples provide of the support structure provide a tubular flexure having an internal gas conduit, a platen portion mounting tab connected to the flexure and having an internal gas input slot that is in fluid communication with the internal gas conduit of the flexure, the platen portion mounting tab being adapted for connection to a platen portion of a platen, and a base plate mounting tab connected to the flexure and having an internal gas output slot that is in fluid communication with the internal gas conduit of the flexure, the base plate mounting tab being adapted for connection to a base plate of the platen.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.