Inventor · Bedford, MA, US

Roger B. Fish

25Patents
4h-index
30Co-inventors
63Inventor score

Filing activity: Dec 17, 1999 → Oct 12, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6347919B1 Wafer processing chamber having separable upper and lower halves Emerging Cross-Sectional Technologies 16 Expired
US6429139B1 Serial wafer handling mechanism Emerging Cross-Sectional Technologies 12 Expired
US9108322B2 Force sensing system for substrate lifting apparatus Emerging Cross-Sectional Technologies 5 Active
US8328494B2 In vacuum optical wafer heater for cryogenic processing Electricity 4 Active
US7977652B2 Optical heater for cryogenic ion implanter surface regeneration Electricity 3 Active
US6734439B2 Wafer pedestal tilt mechanism and cooling system Electricity 2 Expired
US10704693B2 Cryogenic ferrofluid sealed rotary union Mechanical Engineering; Lighting; Heating 2 Active
US9417138B2 Gas coupled probe for substrate temperature measurement Physics 2 Active
US8149256B2 Techniques for changing temperature of a platen Electricity 2 Active
US8020398B2 Fluid delivery mechanism for vacuum wafer processing system Emerging Cross-Sectional Technologies 2 Active
US9514916B2 Wafer platen thermosyphon cooling system Electricity 1 Active
US9163772B2 Vacuum insulated cryogenic fluid transfer hose Emerging Cross-Sectional Technologies 1 Active
US8804288B2 Technique for limiting transmission of fault current Emerging Cross-Sectional Technologies 1 Active
US9530682B2 System and apparatus for holding a substrate over wide temperature range Electricity 0 Active
US12181054B2 Linear actuated 3 way spool valve with constant total flow Mechanical Engineering; Lighting; Heating 0 Active
US10032601B2 Platen support structure Electricity 0 Active
US8998269B2 Vacuum insulated fitting enclosure Emerging Cross-Sectional Technologies 0 Active
US9338829B2 Heated platen with improved temperature uniformity Electricity 0 Active
US9212949B2 Technique for temperature measurement and calibration of semiconductor workpieces using infrared Electricity 0 Active
US8467158B2 Technique for limiting transmission of fault current Emerging Cross-Sectional Technologies 0 Active
US12232299B2 Methods and apparatus for cooling a substrate support Electricity 0 Active
US10541137B2 Method and apparatus for non line-of-sight doping Electricity 0 Active
US11631588B2 Method and apparatus for non line-of-sight doping Electricity 0 Active
US9391450B2 Technique for limiting transmission of fault current Emerging Cross-Sectional Technologies 0 Active
US8320088B2 Power transfer mechanism for use in transmission and distribution level electrical power systems Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.