Patent · US Active

Gas-phase synthesis of epitaxial semiconductor wires from seed crystals

US10036101B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

QUNANO AB · SE

Inventors

Lars Samuelson · Malmö, SE
Martin Magnusson · Malmö, SE
Knut Deppert · Lund, SE
Magnus Heurlin · Furulund, SE

Key dates

Filing date	Sep 2, 2016
Grant date	Jul 31, 2018
Priority date	—
Expiry date	Sep 27, 2036

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC30B29/62
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The present invention provides a method and a system for forming wires (1) that enables a large scale process combined with a high structural complexity and material quality comparable to wires formed using substrate-based synthesis. The wires (1) are grown from catalytic seed particles (2) suspended in a gas within a reactor. Due to a modular approach wires (1) of different configuration can be formed in a continuous process. In-situ analysis to monitor and/or to sort particles and/or wires formed enables efficient process control.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.