Photosensitive polyimide compositions
US10036952B2 · kind B2 · utility
3Cited by
11References
45Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 19, 2016 |
| Grant date | Jul 31, 2018 |
| Priority date | — |
| Expiry date | Apr 19, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/311
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
This disclosure relates to a photosensitive composition that includes at least one fully imidized polyimide polymer having a weight average molecular weight in the range of about 20,000 Daltons to about 70,000 Daltons; at least one solubility switching compound; at least one photoinitiator; and at least one solvent. The composition is capable of forming a film or a dry film having a dissolution rate of greater than about 0.15 micron/second using cyclopentanone as a developer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.