Method of manufacturing the display apparatus including first inorganic layer and second inorganic layer
US10043998B2 · kind B2 · utility
0Cited by
0References
17Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Feb 24, 2017 |
| Grant date | Aug 7, 2018 |
| Priority date | — |
| Expiry date | Feb 24, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2102/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A display apparatus and an apparatus for and method of manufacturing the display apparatus. The display apparatus includes: a substrate; a display unit formed on the substrate; and a thin film encapsulation layer formed on the display unit. The thin film encapsulation layer includes an inorganic layer, and the inorganic layer includes a first sub-inorganic layer including a compound oxide including at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.