Detaching probe from TEM sample during sample preparation
US10053768B2 · kind B2 · utility
0Cited by
9References
14Claims
0Family size
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Key dates
| Filing date | Aug 11, 2014 |
| Grant date | Aug 21, 2018 |
| Priority date | — |
| Expiry date | Nov 9, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31745
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved method of preparing a TEM sample. A sample is extracted from a work piece and attached to a probe for transport to a sample holder. The sample is attached to the sample holder using charged particle beam deposition, and mechanically separated from probe by moving the probe and the sample holder relative to each other, without severing the connection using a charged particle beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.