Cooling pedestal with coating of diamond-like carbon
US10053778B2 · kind B2 · utility
3Cited by
45References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2014 |
| Grant date | Aug 21, 2018 |
| Priority date | — |
| Expiry date | Feb 27, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A cooling pedestal for supporting a substrate, comprises a support structure having cooling conduits to flow a fluid therethrough to cool the substrate, and a contact surface comprising a coating of a diamond-like carbon. The coating comprises (i) a coefficient of friction of less than about 0.3, (ii) an average surface roughness of less than about 0.4 micrometers, and (iii) a microhardness of at least about 8 GPa.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.