Patent · US Active

Device and method for generating a vapor for a CVD or PVD device from multiple liquid or solid source materials

US10060022B2 · kind B2 · utility

0Cited by
3References
9Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 16, 2015
Grant dateAug 28, 2018
Priority date—
Expiry dateJun 16, 2035

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C16/45574
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

In a method and a device for generating vapor for a CVD or PVD device, liquid or solid particles of a first source material are fed into a first heat transfer body via a first feed line. The first heat transfer body vaporizes the particles into a first vapor, which is transported by a carrier gas from the first heat transfer body into a second heat transfer body arranged after the first heat transfer body. The first heat transfer body is heated to a first temperature, and the second heat transfer body is heated to a second temperature. Liquid or solid particles of a second source material are fed into a second heat transfer body via a second feed line. The second heat transfer body vaporizes the particles into a second vapor, which is transported along with the first vapor out of the second heat transfer body by the carrier gas.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.