Measuring probe with attenuating device for measuring the thickness of thin films
US10060718B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 24, 2014 |
| Grant date | Aug 28, 2018 |
| Priority date | — |
| Expiry date | Aug 8, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D11/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measuring probe for the measurement of the thickness of thin layers, includes a housing, at least one sensor element which is mounted with at least one spring element to be flexible with respect to the housing, the sensor element having a spherical positioning cap pointing towards the measuring surface of an object of measurement against a touchdown direction and along a longitudinal axis thereof, and an attenuating device on the housing which acts in the touchdown direction of the at least one sensor element before the sensor element is fitted onto the measuring surface of the object of measurement and attenuates the touchdown movement of the at least one sensor element in the direction of the measuring surface of the object of measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.