Werner Volz
6Patents
2h-index
7Co-inventors
44Inventor score
Filing activity: Feb 12, 1979 → Jun 15, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4406948A | Device for measuring thin films by means of beta radiation | Physics | 7 | Expired |
| US4258675A | Regulator apparatus such as a centrifugal governor for internal combustion engines | Mechanical Engineering; Lighting; Heating | 2 | Expired |
| US10707112B2 | Vacuum chuck for clamping workpieces, measuring devices and method for checking workpieces, in particular wafers | Electricity | 2 | Active |
| US9976943B2 | Device to position and align a rotationally-symmetrical body | Physics | 1 | Active |
| US10060718B2 | Measuring probe with attenuating device for measuring the thickness of thin films | Physics | 0 | Active |
| US11062934B2 | Vacuum chuck for clamping workpieces, measuring devices and method for checking workpieces, in particular wafers | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.