Front opening ring pod

US10062589B2 · kind B2 · utility

Assignee

• Lam Research Corporation · US

Inventors

• Scott Wong · Sunnyvale, US
• Damon Tyrone Genetti · Livermore, US
• Derek John Witkowicki · Newark, US
• Alex Paterson · San Jose, US
• Richard H. Gould · Fremont, US
• Austin Ngo · San Jose, US
• Marc Estoque · San Jose, US

Key dates

• Filing date: Aug 9, 2017
• Grant date: Aug 28, 2018
• Expiry date: Aug 9, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68707
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.