Patent · US Active

Integrated circuits with magnetic tunnel junction memory cells and methods for producing the same

US10062733B1 · kind B1 · utility

5Cited by
2References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 31, 2017
Grant dateAug 28, 2018
Priority date
Expiry dateMay 31, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N50/01

Abstract

Integrated circuits and methods of producing the same are provided. In an exemplary embodiment, a method for producing an integrated circuit includes forming a memory cell with a memory cell upper surface. A capping layer is formed overlying the memory cell, and a portion of the capping layer is removed to expose the memory cell upper surface. A memory cell etch stop is formed overlying the memory cell upper surface after the portion of the capping layer is removed to expose the memory cell upper surface. The memory cell etch stop is removed from overlying the memory cell upper surface, and an interconnect is formed in electrical communication with the memory cell.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.