Patent · US Active

Methods and devices for examining an electrically charged specimen surface

US10068747B2 · kind B2 · utility

2Cited by

8References

25Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Michael Budach · Hanau, DE
Michael Schnell · Ingolstadt, DE
Bernd Schindler · Werl, DE
Markus Boese · Aalen, DE

Key dates

Filing date	Aug 31, 2016
Grant date	Sep 4, 2018
Priority date	—
Expiry date	Aug 31, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3174
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for examining a specimen surface with a probe of a scanning probe microscope, the specimen surface having an electrical potential distribution. The method includes (a) determining the electrical potential distribution of at least one first partial region of the specimen surface; and (b) modifying the electrical potential distribution in the at least one first partial region of the specimen surface and/or modifying an electrical potential of the probe of the scanning probe microscope before scanning at least one second partial region of the specimen surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.