Detector for low temperature transmission pyrometry
US10072986B1 · kind B1 · utility
2Cited by
12References
20Claims
0Family size
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Key dates
| Filing date | Jul 20, 2017 |
| Grant date | Sep 11, 2018 |
| Priority date | — |
| Expiry date | Jul 20, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67248
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and methods of processing substrates include a detector manifold to detect radiation from proximate a processing area in a chamber body; a radiation detector optically coupled to the detector manifold; and a spectral multi-notch filter. Apparatus and methods of processing substrates include detecting transmitted radiation from an emitting surface of a substrate in a chamber body; conveying at least one spectral band of the detected radiation to a photodetector; and analyzing the detected radiation in the at least one spectral band to determine an inferred temperature of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.