Patent · US Active

System and method for setting a temperature of an object within a chamber

US10074512B2 · kind B2 · utility

0Cited by

2References

17Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Chun-Hsiang YEN · Huxi Town, TW
Barak Dee-Noor · Herzliya, IL
Yuval Gronau · Ramat HaSharon, IL
Ronen Hagai · Kiryat Ekron, IL
Efim Vinnitsky · Ashkelon, IL
Yohanan Madmon · Mazkeret Batya, IL

Key dates

Filing date	Jul 9, 2015
Grant date	Sep 11, 2018
Priority date	—
Expiry date	Jun 4, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/12
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A system that may include a chamber, a motorized system, a chuck, a controller, multiple temperature sensors and a cooling module; wherein the chuck is configured to support an object that is positioned within the chamber; wherein the motorized system is configured to move the chuck in relation to the chamber; wherein the multiple temperature sensors are configured to sense multiple temperatures of at least one point within the chamber; wherein the cooling module is configured to cool a unit of the motorized system; and wherein the controller is configured to control the cooling module in response to the multiple temperatures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.