Patent assignee · IL · COMPANY

Applied Materials Israel Ltd.

530Patents
450Active
530Granted
61Portfolio score

Filing activity: Feb 21, 2002 → Sep 13, 2023 · 83 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7217579B2 Voltage contrast test structure Physics 88 Expired
US7244949B2 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Electricity 85 Expired
US7902849B2 Apparatus and method for test structure inspection Physics 79 Active
US7468506B2 Spot grid array scanning system Physics 53 Expired
US7759642B2 Pattern invariant focusing of a charged particle beam Electricity 49 Active
US7135344B2 Design-based monitoring Physics 47 Expired
US6899765B2 Chamber elements defining a movable internal chamber Emerging Cross-Sectional Technologies 38 Expired
US7842933B2 System and method for measuring overlay errors Electricity 38 Expired
US7696497B2 Focusing system and method for a charged particle imaging system Electricity 38 Expired
US9153413B2 Multi-beam scanning electron beam device and methods of using the same Electricity 37 Active
US7468507B2 Optical spot grid array scanning system Physics 29 Expired
US9263233B2 Charged particle multi-beam inspection system and method of operating the same Electricity 28 Active
US9336981B2 Charged particle detection system and multi-beamlet inspection system Electricity 27 Active
US7504622B2 High throughput multi beam detection system and method Electricity 26 Active
US9653254B2 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Electricity 24 Active
US8709269B2 Method and system for imaging a cross section of a specimen Physics 24 Active
US7535001B2 Method and system for focusing a charged particle beam Electricity 23 Active
US7375326B2 Method and system for focusing a charged particle beam Electricity 23 Active
US10541112B2 Charged particle beam system and method of operating the same Electricity 22 Active
US9530613B2 Focusing a charged particle system Electricity 22 Active
US7619203B2 High throughput multi beam detection system and method Physics 22 Active
US9702983B2 Multi-spot collection optics Electricity 22 Active
US8315453B2 Defect classification with optimized purity Physics 22 Active
US7285779B2 Methods of scanning an object that includes multiple regions of interest using an array of scanning beams Electricity 22 Expired
US10354831B2 Charged particle inspection method and charged particle system Electricity 22 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.