Workpiece loader for a wet processing system
US10074554B2 · kind B2 · utility
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9References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 27, 2016 |
| Grant date | Sep 11, 2018 |
| Priority date | — |
| Expiry date | Mar 15, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Techniques herein provide a workpiece handling and loading apparatus for loading, unloading, and handling relatively flexible and thin substrates for transport and electrochemical deposition. Such a system assists with workpiece holder exchange between a delivery cartridge or magazine, and a workpiece holder. Embodiments include a workpiece handler configured to provide an air cushion to a given workpiece, and maneuvering to a given workpiece holder that can edge clamp the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.