Inventor · Lexington, MA, US

Daniel Goodman

21Patents
7h-index
16Co-inventors
66Inventor score

Filing activity: Jul 14, 1995 → Jan 11, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US5659223A System for extracting a high power beam comprising air dynamic and foil windows Electricity 110 Expired
US5997682A Phase-separated dual-cure elastomeric adhesive formulations and methods of using the same Chemistry; Metallurgy 23 Expired
US9421617B2 Substrate holder Emerging Cross-Sectional Technologies 13 Active
US6110318A System for selective electron beam irradiation Electricity 9 Expired
US8967935B2 Substrate loader and unloader Electricity 7 Active
US8420981B2 Apparatus for thermal processing with micro-environment Electricity 7 Active
US5891292A Method of making fiber reinforced composites and coatings Performing Operations; Transporting 7 Expired
US8613474B2 Substrate loader and unloader having a Bernoulli support Electricity 4 Active
US9117856B2 Substrate loader and unloader having an air bearing support Electricity 3 Active
US9988735B2 Electrochemical deposition apparatus and methods for controlling the chemistry therein Chemistry; Metallurgy 2 Active
US9508582B2 Parallel single substrate marangoni module Electricity 1 Active
US11887874B2 Adaptive focusing and transport system for electroplating Electricity 0 Active
US8858755B2 Edge bevel removal apparatus and method Emerging Cross-Sectional Technologies 0 Active
US9449862B2 Parallel single substrate processing system Electricity 0 Active
US11942341B2 Adaptive focusing and transport system for electroplating Electricity 0 Active
US10074554B2 Workpiece loader for a wet processing system Electricity 0 Active
US9637836B2 Electrochemical deposition apparatus and methods for controlling the chemistry therein Chemistry; Metallurgy 0 Active
US11174544B2 Batch processing system with vacuum isolation Electricity 0 Active
US9293356B2 Parallel single substrate processing system Electricity 0 Active
US9714474B2 Seed layer deposition in microscale features Electricity 0 Active
US9147588B2 Substrate processing pallet with cooling Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.