Sensor integrated metal dielectric filters for solar-blind silicon ultraviolet detectors
US10078142B2 · kind B2 · utility
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8References
20Claims
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Key dates
| Filing date | Feb 9, 2016 |
| Grant date | Sep 18, 2018 |
| Priority date | — |
| Expiry date | Feb 9, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/18
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
A filter for electromagnetic radiation including one or more dielectric spacer regions and one or more reflective regions integrated on a semiconductor substrate, the semiconductor substrate including a semiconductor photodetector, such that the filter transmits ultraviolet radiation to the semiconductor photodetector, the ultraviolet radiation having a range of wavelengths, and the filter suppresses transmission of electromagnetic radiation, having wavelengths outside the range of wavelengths, to the semiconductor photodetector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.