Patterning devices using branched fluorinated photopolymers
US10078262B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 9, 2017 |
| Grant date | Sep 18, 2018 |
| Priority date | — |
| Expiry date | Oct 9, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/325
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fluorinated photopolymer composition is disclosed having a branched copolymer provided in a fluorinated solvent. The copolymer includes a branching unit, a first repeating unit having a fluorine-containing group, and a second repeating unit having a solubility-altering reactive group. The branched fluorinated photopolymer composition is particularly suited for the fabrication of organic electronic and bioelectronic devices, or other devices having sensitive active organic materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.