Method for producing at least one deformable membrane micropump and deformable membrane micropump
US10082135B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Nov 12, 2010 |
| Grant date | Sep 25, 2018 |
| Priority date | — |
| Expiry date | Nov 17, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/494
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A method for producing at least one deformable membrane micropump including a first substrate and a second substrate assembled together, the first substrate including at least one cavity and the second substrate including at least one deformable membrane arranged facing the cavity. In the method: the cavity is produced in the first substrate; then the first and second substrates are assembled together; then the deformable membrane is produced in the second substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.