Water-repellent protective film, and chemical solution for forming protective film
US10090148B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 4, 2013 |
| Grant date | Oct 2, 2018 |
| Priority date | — |
| Expiry date | Jan 7, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/22
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A surface treatment was conducted by using a liquid chemical containing a water-repellent protective film forming agent represented by the following general formula [1], subsequent to a step of cleaning a metal-based wafer and prior to a step of drying the wafer.(R1 represents a C1-C18 monovalent hydrocarbon group the hydrogen elements of which may partially or entirely be replaced with a fluorine element(s). R2 mutually independently represents a monovalent organic group having a C1-C18 hydrocarbon group the hydrogen elements of which may partially or entirely be replaced with a fluorine element(s). “a” is an integer of from 0 to 2.)
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.