Shinobu Arata
16Patents
3h-index
10Co-inventors
49Inventor score
Filing activity: Feb 24, 2009 → Sep 14, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8828144B2 | Process for cleaning wafers | Electricity | 14 | Active |
| US9090782B2 | Liquid chemical for forming water repellent protective film | Electricity | 5 | Active |
| US9228120B2 | Liquid chemical for forming protecting film | Chemistry; Metallurgy | 4 | Active |
| US9691603B2 | Chemical for forming protective film | Electricity | 3 | Active |
| US9281178B2 | Cleaning agent for silicon wafer | Chemistry; Metallurgy | 3 | Active |
| US9748092B2 | Liquid chemical for forming protecting film | Chemistry; Metallurgy | 3 | Active |
| US9053924B2 | Cleaning agent for silicon wafer | Chemistry; Metallurgy | 3 | Active |
| US8932390B2 | Liquid chemical for forming protecting film | Chemistry; Metallurgy | 1 | Active |
| US9349582B2 | Liquid chemical for forming water repellent protecting film, and process for cleaning wafers using the same | Electricity | 1 | Active |
| US10077365B2 | Liquid chemical for forming water repellent protecting film, and process for cleaning wafers using the same | Electricity | 0 | Active |
| US8623464B2 | Process for production of water-absorbing articles | Emerging Cross-Sectional Technologies | 0 | Active |
| US10090148B2 | Water-repellent protective film, and chemical solution for forming protective film | Chemistry; Metallurgy | 0 | Active |
| US10236175B2 | Liquid chemical for forming protecting film | Chemistry; Metallurgy | 0 | Active |
| US10037882B2 | Method for cleaning wafer | Chemistry; Metallurgy | 0 | Active |
| US9496131B2 | Liquid chemical for forming protecting film | Chemistry; Metallurgy | 0 | Active |
| US9478407B2 | Liquid chemical for forming protecting film | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.