Integrated photodetector waveguide structure with alignment tolerance
US10090422B2 · kind B2 · utility
7Cited by
21References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 2016 |
| Grant date | Oct 2, 2018 |
| Priority date | — |
| Expiry date | May 16, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.