Pre-collapsed CMUT with mechanical collapse retention
US10092270B2 · kind B2 · utility
6Cited by
8References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 10, 2010 |
| Grant date | Oct 9, 2018 |
| Priority date | — |
| Expiry date | Dec 23, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B1/0292
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A CMUT transducer cell suitable for use in an ultrasonic CMUT transducer array has a membrane with a first electrode, a substrate with a second electrode, and a cavity between the membrane and the substrate. The CMUT is operated in a precollapsed state by biasing the membrane to a collapsed condition with the floor of the cavity, and a lens is cast over the collapsed membrane. When the lens material has polymerized or is of a sufficient stiffness, the bias voltage is removed and the lens material retains the membrane in the collapsed state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.