Peter Dirksen
55Patents
16h-index
87Co-inventors
87Inventor score
Filing activity: May 24, 1994 → Aug 16, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6046792A | Differential interferometer system and lithographic step-and-scan apparatus provided with such a system | Physics | 404 | Expired |
| US7050146B2 | Lithographic apparatus and device manufacturing method | Physics | 113 | Expired |
| US5674650A | Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method | Physics | 90 | Expired |
| US8327521B2 | Method for production and using a capacitive micro-machined ultrasonic transducer | Emerging Cross-Sectional Technologies | 81 | Active |
| US6160622A | Alignment device and lithographic apparatus comprising such a device | Physics | 70 | Expired |
| US6248486A | Method of detecting aberrations of an optical imaging system | Physics | 60 | Expired |
| US7145641B2 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Physics | 41 | Expired |
| US6368763B2 | Method of detecting aberrations of an optical imaging system | Emerging Cross-Sectional Technologies | 40 | Expired |
| US6417922B1 | Alignment device and lithographic apparatus comprising such a device | Electricity | 34 | Expired |
| US8689606B2 | Gas sensing using ultrasound | Physics | 33 | Active |
| US8148052B2 | Double patterning for lithography to increase feature spatial density | Electricity | 32 | Active |
| US9132693B2 | Capacitive micromachine ultrasound transducer | Emerging Cross-Sectional Technologies | 27 | Active |
| US5910847A | Method of determining the radiation dose in a lithographic apparatus | Physics | 26 | Expired |
| US5485272A | Radiation-source unit for generating a beam having two directions of polarisation and two frequencies | Physics | 26 | Expired |
| US5917604A | Alignment device and lithographic apparatus provided with such a device | Electricity | 21 | Expired |
| US8193685B2 | Thin film detector for presence detection | Emerging Cross-Sectional Technologies | 20 | Active |
| US5673101A | Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method | Physics | 15 | Expired |
| US8401513B2 | Proximity sensor, in particular microphone for reception of sound signals in the human audible sound range, with ultrasonic proximity estimation | Electricity | 13 | Active |
| US9550211B2 | Temperature compensation in a CMUT device | Emerging Cross-Sectional Technologies | 10 | Active |
| US7037626B2 | Lithographic method of manufacturing a device | Physics | 9 | Expired |
| US6331368A | Test object for use in detecting aberrations of an optical imaging system | Physics | 8 | Expired |
| US6544694B2 | Method of manufacturing a device by means of a mask phase-shifting mask for use in said method | Physics | 7 | Expired |
| US10092270B2 | Pre-collapsed CMUT with mechanical collapse retention | Performing Operations; Transporting | 6 | Active |
| US9539854B2 | Capacitive micromachined ultrasound transducer | Emerging Cross-Sectional Technologies | 6 | Active |
| USRE42849E1 | Lithographic apparatus and device manufacturing method | General | 6 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.