Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same

US10095126B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Jens Prochnau · Oberkochen, DE
• Marwene Nefzi · Ulm, DE
• Dirk Schaffer · Jena, DE

Key dates

• Filing date: Jul 25, 2017
• Grant date: Oct 9, 2018
• Expiry date: Jul 25, 2037

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F16F15/03
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The present application discloses a component having a movably mounted component element of a projection exposure apparatus and in particular a movement limiting apparatus, and a method for limiting the movement of movable component elements of a component of a projection exposure apparatus.