Patent · US Active

Carrier and a method for processing a carrier

US10096511B2 · kind B2 · utility

0Cited by

13References

9Claims

0Family size

Assignee

Infineon Technologies Dresden GmbH & Co. KG · DE

Inventor

Steffen Bieselt · Wehlen, DE

Key dates

Filing date	Feb 1, 2017
Grant date	Oct 9, 2018
Priority date	—
Expiry date	Feb 1, 2037

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49155
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

According to various embodiments, a carrier may be provided, the carrier including: a hollow chamber spaced apart from a surface of the carrier; a trench structure extending from the surface of the carrier to the hollow chamber and laterally surrounding a first region of the carrier, the trench structure including one or more trenches extending from the surface of the carrier to the hollow chamber, and one or more support structures intersecting the one or more trenches and connecting the first region of the carrier with a second region of the carrier outside the trench structure, wherein the one or more support structures including an electrically insulating material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.