Inventor · Wehlen, DE

Steffen Bieselt

35Patents
4h-index
30Co-inventors
59Inventor score

Filing activity: Oct 9, 2012 → Jun 28, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9382111B2 Micromechanical system and method for manufacturing a micromechanical system Performing Operations; Transporting 10 Active
US9938133B2 System and method for a comb-drive MEMS device Performing Operations; Transporting 8 Active
US9330929B1 Systems and methods for horizontal integration of acceleration sensor structures Performing Operations; Transporting 7 Active
US9263357B2 Carrier with hollow chamber and support structure therein Emerging Cross-Sectional Technologies 4 Active
US10852319B2 Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element Physics 2 Active
US10870575B2 Stressed decoupled micro-electro-mechanical system sensor Electricity 2 Active
US9136328B2 Silicon on nothing devices and methods of formation thereof Performing Operations; Transporting 2 Active
US9929181B2 Method for manufacturing an electronic device and method for operating an electronic device Emerging Cross-Sectional Technologies 2 Active
US9663354B2 Mechanical stress-decoupling in semiconductor device Electricity 2 Active
US9560765B2 Electronic device, a method for manufacturing an electronic device, and a method for operating an electronic device Emerging Cross-Sectional Technologies 1 Active
US10684306B2 Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device Physics 1 Active
US9711393B2 Silicon on nothing devices and methods of formation thereof Performing Operations; Transporting 1 Active
US10539587B2 Accelerometer with compatibility to complementary metal-oxide-semiconductor technologies Physics 1 Active
US9887355B2 Emitter and method for manufacturing the same Physics 1 Active
US10683203B2 Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process Performing Operations; Transporting 1 Active
US11422151B2 Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device Physics 1 Active
US10170497B2 Method for manufacturing an electronic device and method for operating an electronic device Emerging Cross-Sectional Technologies 1 Active
US9716015B2 Carrier and a method for processing a carrier Emerging Cross-Sectional Technologies 1 Active
US10961116B2 Micro-mechanical sensor and method for manufacturing a micro-electro-mechanical sensor Performing Operations; Transporting 1 Active
US9896329B2 Integrated semiconductor device and manufacturing method Performing Operations; Transporting 0 Active
US11078072B2 Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process Performing Operations; Transporting 0 Active
US10096511B2 Carrier and a method for processing a carrier Emerging Cross-Sectional Technologies 0 Active
US9938135B2 Stress decoupled piezoresistive relative pressure sensor and method for manufacturing the same Physics 0 Active
US10580663B2 Microelectromechanical device and method for forming a microelectromechanical device having a support structure holding a lamella structure Performing Operations; Transporting 0 Active
US9991340B2 Mechanical stress-decoupling in semiconductor device Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.