Patent · US Active

Microelectronic test device including a probe card having an interposer

US10101367B2 · kind B2 · utility

0Cited by
2References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 10, 2015
Grant dateOct 16, 2018
Priority date—
Expiry dateNov 29, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/2889
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A microelectronic test device comprising an organic substrate, a probe holder, and an interposer disposed between the organic substrate and the probe holder, wherein the interposer has a coefficient of thermal expansion that is less than a coefficient of thermal expansion of the organic substrate. The interposer may effectively decouple the organic substrate from probes in the probe holder, which may substantially reduce or eliminate probe misalignment due to the coefficient of thermal expansion mismatch between the organic substrate and other components of the microelectronic test device and to provide require stiffness to the organic substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.