Microwave automatic matcher and plasma processing apparatus
US10109463B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2016 |
| Grant date | Oct 23, 2018 |
| Priority date | — |
| Expiry date | Feb 11, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32917
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microwave automatic matcher includes a movable body, a driving unit, a matching control unit, a reflection coefficient measuring unit, and a setting unit. The matching control unit consecutively moves the movable body from a start position in one direction by a distance of a difference between the start position and the target position in a matching operation carried out for the plasma process and then variably controls the position of the movable body until the measurement of the reflection coefficient obtained by the reflection coefficient measuring unit falls within the first neighboring range by monitoring the measurement of the reflection coefficient.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.