Pickup unit and pickup system of semiconductor device including the same
US10109518B1 · kind B1 · utility
0Cited by
8References
18Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Oct 31, 2017 |
| Grant date | Oct 23, 2018 |
| Priority date | — |
| Expiry date | Oct 31, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB25J15/0616
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A pickup apparatus includes a plurality of pickers sliding along a first direction and a space adjuster including a plurality of space adjusting plates. Each picker includes a protruding portion combined with a picker body, and each of the space adjusting plates is between a respective pair of adjacent pickers. The protruding portion of each picker contacts sidewalls of adjacent space adjusting plates. At least one of the space adjusting plates moves along a second direction crossing the first direction. A width in the first direction of each space adjusting plate varies along the second direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.