Semes Co., Ltd.
696Patents
685Active
696Granted
70Portfolio score
Filing activity: Apr 11, 2003 → Oct 23, 2023 · 53 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9987747B2 | Stocker for receiving cassettes and method of teaching a stocker robot disposed therein | Emerging Cross-Sectional Technologies | 391 | Active |
| US7618599B2 | Reaction chamber for manufacturing a carbon nanotube, apparatus for manufacturing the carbon nanotube and system for manufacturing the carbon nanotube | Emerging Cross-Sectional Technologies | 29 | Active |
| US7323080B2 | Apparatus for treating substrate | Electricity | 18 | Expired |
| US6939807B2 | Apparatus for manufacturing semiconductor devices with a moveable shield | Electricity | 17 | Expired |
| US7611182B2 | Wafer transfer apparatus | Emerging Cross-Sectional Technologies | 16 | Expired |
| US9275847B2 | Recycling unit and substrate treating apparatus | Electricity | 14 | Active |
| US8289496B2 | System and method for treating substrate | Electricity | 13 | Active |
| US9506695B2 | Substrate treating apparatus and method | Electricity | 13 | Active |
| US11148150B2 | Liquid dispensing nozzle and substrate treating apparatus | Performing Operations; Transporting | 11 | Active |
| US7866058B2 | Spin head and substrate treating method using the same | Emerging Cross-Sectional Technologies | 11 | Active |
| US8113141B2 | Apparatus for processing a substrate | Emerging Cross-Sectional Technologies | 11 | Active |
| US8113142B2 | Apparatus for processing a substrate | Emerging Cross-Sectional Technologies | 9 | Active |
| US8793898B2 | Apparatus and method for drying substrates | Electricity | 9 | Active |
| US8293071B2 | Spin head | Electricity | 9 | Active |
| US10197333B2 | Method and apparatus for drying substrate | Electricity | 7 | Active |
| US8113918B2 | Substrate supporting unit and single type substrate polishing apparatus using the same | Electricity | 7 | Active |
| US10796891B2 | Substrate processing apparatus and substrate processing method | Electricity | 7 | Active |
| US7332691B2 | Cooling plate, bake unit, and substrate treating apparatus | Electricity | 7 | Expired |
| US10109506B2 | Unit for supplying fluid, apparatus and method for treating substrate with the unit | Electricity | 6 | Active |
| US8721834B2 | Apparatus for treating substrate | Electricity | 6 | Active |
| US7944363B2 | Apparatus and method of sensing leakage of chemical liquid | Emerging Cross-Sectional Technologies | 6 | Active |
| US8714169B2 | Spin head, apparatus for treating substrate, and method for treating substrate | Electricity | 6 | Active |
| US10490427B2 | Apparatus for treating substrate | Electricity | 6 | Active |
| US9529267B2 | Method for processing a substrate and apparatus for performing the same | Electricity | 5 | Active |
| US8738174B2 | Substrate processing apparatus and method for loading and unloading substrates | Emerging Cross-Sectional Technologies | 5 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.