Patent · US Active

Transistor structure including a scandium gallium nitride back-barrier layer

US10109728B2 · kind B2 · utility

1Cited by
0References
21Claims
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Inventor

Key dates

Filing dateNov 8, 2017
Grant dateOct 23, 2018
Priority date
Expiry dateNov 8, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/852

Abstract

A transistor structure including a scandium gallium nitride back-barrier layer. For instance, the transistor structure may include a buffer layer disposed on a substrate and a back-barrier layer disposed on the buffer layer, the back-barrier layer including scandium gallium nitride (ScxGa1-xN). The transistor structure may further include a channel layer disposed on the back-barrier layer, and a barrier layer disposed on the channel layer. The barrier layer may include at least one of aluminum gallium nitride, indium gallium aluminum nitride, scandium aluminum nitride, scandium aluminum gallium nitride, or indium gallium boron aluminum nitride. The transistor structure may be incorporated into a high electron mobility transistor (HEMT).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.