Patent · US Active

Process for producing an electromechanical device

US10112827B2 · kind B2 · utility

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18Claims

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Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Vincent Agache · Saint-Égrève, FR
Francois Baleras · Seyssinet-Pariset, FR

Key dates

Filing date	Nov 29, 2017
Grant date	Oct 30, 2018
Priority date	—
Expiry date	Nov 29, 2037

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/053
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

The invention is a process for producing an electromechanical device including a movable portion that is able to deform with respect to a fixed portion. The process implements steps based on fabrication microtechnologies, applied to a substrate including an upper layer, an intermediate layer and a lower layer. These steps are:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.