Semiconductor single crystal pulling apparatus and method for remelting semiconductor single crystal using this
US10113247B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2015 |
| Grant date | Oct 30, 2018 |
| Priority date | — |
| Expiry date | Sep 9, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B15/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A single crystal pulling apparatus including: a remelting detection apparatus which detects that remelting of a lower end portion of the semiconductor single crystal is completed from a change in weight of the semiconductor single crystal when the lower end portion of the semiconductor single crystal is immersed in the melt to be remolten by using the wire; and a lowermost end detection apparatus which detects a lowermost end of the semiconductor single crystal from a position where no current flows between the semiconductor single crystal and the melt when the semiconductor single crystal is taken up with the use of the wire while applying a voltage between the semiconductor single crystal and the melt by applying a voltage between the crucible and the wire.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.