Patent · US Active

Methods and devices for charge compensation

US10115558B2 · kind B2 · utility

0Cited by

3References

26Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Andreas Schmaunz · Oberkochen, DE
Markus Esseling · Aalen, DE
Dirk Zeidler · Oberkochen, DE

Key dates

Filing date	Mar 3, 2016
Grant date	Oct 30, 2018
Priority date	—
Expiry date	Jul 29, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2801
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Methods are provided for operating a particle-optical device, wherein electrical charging of a sample to be examined is reduced. The particle-optical device includes a vacuum chamber for receiving a sample, a particle source for generating a primary particle beam directed to the sample, a scan generator for directed guidance of the primary particle beam over the sample surface, and at least one detector for detecting interaction products created during the interaction between the primary particle beam and the sample.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.