Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus
US10121685B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2016 |
| Grant date | Nov 6, 2018 |
| Priority date | — |
| Expiry date | Jun 23, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A treatment solution supply method includes: a degassed treatment solution generating step of degassing a treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the treatment solution in the container through the filter; and a negative pressure maintaining step of maintaining a state in which the downstream side from the filter is brought to the negative pressure, for a predetermined period, after stopping supply of the treatment solution from the container to the filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.