MEMS devices having discharge circuits
US10125011B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 13, 2015 |
| Grant date | Nov 13, 2018 |
| Priority date | — |
| Expiry date | Apr 13, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/56
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
MEMS devices having discharge circuits. In some embodiments, a MEMS device can include a substrate and an electromechanical assembly implemented on the substrate. The MEMS device can further include a discharge circuit implemented relative to the electromechanical assembly. The discharge circuit can be configured to provide a preferred arcing path during a discharge condition affecting the electromechanical assembly. The MEMS device can be, for example, a switching device, a capacitance device, a gyroscope sensor device, an accelerometer device, a surface acoustic wave (SAW) device, or a bulk acoustic wave (BAW) device. The discharge circuit can include a spark gap assembly having one or more spark gap elements configured to facilitate the preferred arcing path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.