Method for blocking a trench portion
US10128124B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2015 |
| Grant date | Nov 13, 2018 |
| Priority date | — |
| Expiry date | Dec 9, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76816
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method is provided for blocking a portion of a longitudinal through-hole during manufacture of a semiconductor structure, comprising the steps of: forming a stack comprising a hard mask comprising at least one trench, and a first coating filling the at least one trench and coating the hard mask, wherein the first coating comprises one or more materials that can be etched selectively with respect to a second coating; etching at least one vertical via in the first coating directly above the portion of the trench in such a way as to remove the first coating over at least a fraction of the depth of the trench, filling the at least one via with the second coating material, and removing the first coating selectively with respect to the second coating from at least the one or more longitudinal through-holes in such a way as to leave in place any of the first coating present directly underneath the second coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.