MEMS microphone, apparatus comprising a MEMS microphone and method for fabricating a MEMS microphone
US10129676B2 · kind B2 · utility
13Cited by
5References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2016 |
| Grant date | Nov 13, 2018 |
| Priority date | — |
| Expiry date | Sep 29, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2499/11
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A MEMS microphone and a method for manufacturing a MEMS microphone are disclosed. Embodiments of the invention provide a MEMS microphone including a MEMS microphone structure having at least one counter electrode structure and a diaphragm structure deflectable with respect to the counter electrode structure and a thermocouple arranged at the MEMS microphone structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.