Patent · US Active

Self correcting floating SIL tip

US10133051B2 · kind B2 · utility

0Cited by

53References

18Claims

0Family size

Assignee

FEI EFA, Inc. · US

Inventors

Jonathan Frank · Los Gatos, US
Prasad Sabbineni · San Ramon, US

Key dates

Filing date	Mar 11, 2015
Grant date	Nov 20, 2018
Priority date	—
Expiry date	Jun 18, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG02B7/023
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optics arrangement for a solid immersion lens (SIL) is disclosed. The arrangement enables the SIL to freely tilt. The arrangement includes a SIL having an optical axis extending from an engaging surface and a rear surface of the SIL; a SIL housing having a cavity configured to accept the SIL therein while allowing the SIL to freely tilt within the cavity, wherein the cavity includes a hole positioned such that the optical axis passes there-through, to thereby allow light collected by the SIL to propagate to an objective lens; and, a SIL retainer attached to the SIL housing and configured to prevent the SIL from exiting the cavity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.