Devices and systems for spatial aggregation of spectral analysis from electron microscopes
US10139356B2 · kind B2 · utility
0Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2017 |
| Grant date | Nov 27, 2018 |
| Priority date | — |
| Expiry date | Sep 15, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/20058
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An x-ray spectrum collected from a sample via excitation of the sample by an electron beam includes artifacts due to interaction volume, surface effects, contamination, or other interferences with the desired collection of representative x-rays from the sample. Inline spectral correlation, summation, averaging, other aggregation, or combinations thereof provides more precise collection of x-ray spectrum from multi-phase, unprepared, particle, or complex samples.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.