Anhydride copolymer top coats for orientation control of thin film block copolymers

US10139724B2 · kind B2 · utility

Assignee

• The Board of Regents of the University of Texas System · US

Inventors

• C. Grant Willson · Austin, US
• Christopher John Ellison · Austin, US
• Takehiro Sleshimo · Austin, US
• Julia Cushen · San Francisco, US
• Christopher M. Bates · Austin, US
• Leon Dean · Spokane, US
• Logan J. Santos · Austin, US
• Erica L. Rausch · Austin, US

Key dates

• Filing date: Aug 28, 2015
• Grant date: Nov 27, 2018
• Expiry date: Jun 12, 2036

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/31855
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The concepts described herein involve the use of random copolymer top coats that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous weak base and can change surface energy once they are deposited onto the block copolymer thin film. The use of self-assembled block copolymers to produce advanced lithographic patterns relies on their orientation control in thin films. Top coats potentially allow for the facile orientation control of block copolymers which would otherwise be quite challenging.