Inventor · Austin, TX, US

C. Grant Willson

20Patents
7h-index
36Co-inventors
69Inventor score

Filing activity: Mar 7, 1997 → Jan 18, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US6696220B2 Template for room temperature, low pressure micro-and nano-imprint lithography Emerging Cross-Sectional Technologies 296 Expired
US6954275B2 Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography Performing Operations; Transporting 57 Expired
US6980282B2 Method for modulating shapes of substrates Physics 43 Expired
US6103445A Photoresist compositions comprising norbornene derivative polymers with acid labile groups Physics 35 Expired
US7365103B2 Compositions for dark-field polymerization and method of using the same for imprint lithography processes Physics 29 Expired
US6399273B1 Water-processable photoresist compositions Emerging Cross-Sectional Technologies 26 Expired
US7060324B2 Method of creating a dispersion of a liquid on a substrate Emerging Cross-Sectional Technologies 15 Expired
US7901945B2 Image and part recognition technology Physics 6 Active
US7691275B2 Use of step and flash imprint lithography for direct imprinting of dielectric materials for dual damascene processing Electricity 4 Active
US7651850B2 Image and part recognition technology Physics 3 Expired
US8017174B2 Densely packed sensor arrays Emerging Cross-Sectional Technologies 2 Active
US9120947B2 Surface treatments for alignment of block copolymers Emerging Cross-Sectional Technologies 1 Active
US9557640B2 Ordering block copolymers Performing Operations; Transporting 1 Active
US9156863B2 Branched siloxanes and methods for synthesis Electricity 1 Active
US9317922B2 Image and part recognition technology Physics 0 Active
US9040121B2 Using chemical vapor deposited films to control domain orientation in block copolymer thin films Emerging Cross-Sectional Technologies 0 Active
US9823568B2 Ordering block copolymers Performing Operations; Transporting 0 Active
US9434750B2 Branched siloxanes and methods for synthesis Electricity 0 Active
US10139724B2 Anhydride copolymer top coats for orientation control of thin film block copolymers Emerging Cross-Sectional Technologies 0 Active
US9802968B2 Branched siloxanes and methods for synthesis Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.