Methods and apparatuses for wireless communication with a brush
US10149135B1 · kind B1 · utility
0Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 2017 |
| Grant date | Dec 4, 2018 |
| Priority date | — |
| Expiry date | May 30, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67294
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
Provided is a disclosure for embodiments for a brush with communication capabilities, which is configured to clean a surface of, for example, a semiconductor wafer, as well as an offline brush conditioning system and a CMP system that can communicate with the brush.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.