Precision surface measurement in a vacuum
US10151574B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Jul 12, 2017 |
| Grant date | Dec 11, 2018 |
| Priority date | — |
| Expiry date | Jul 12, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and related equipment for dynamic on-axis in-situ interferometry where the reference surface is positioned in an vacuum chamber. The systems use a wavelength shifting, or a phase shifting interferometer that allows the freedom to eliminate the need to step the cavity length physically with the reference surface, allowing the reference surface to be placed inside the vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.