Inventor · Sunnyvale, CA, US

Jun Qian

118Patents
13h-index
174Co-inventors
89Inventor score

Filing activity: May 14, 1997 → Oct 31, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US9257274B2 Gapfill of variable aspect ratio features with a composite PEALD and PECVD method Electricity 504 Active
US9425078B2 Inhibitor plasma mediated atomic layer deposition for seamless feature fill Electricity 434 Active
US9997357B2 Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Electricity 413 Active
US9745658B2 Chamber undercoat preparation method for low temperature ALD films Chemistry; Metallurgy 357 Active
US9966299B2 Inhibitor plasma mediated atomic layer deposition for seamless feature fill Electricity 348 Active
US6135647A System and method for representing a system level RTL design using HDL independent objects and translation to synthesizable RTL code Physics 47 Expired
US10037884B2 Selective atomic layer deposition for gapfill using sacrificial underlayer Electricity 25 Active
US9793110B2 Gapfill of variable aspect ratio features with a composite PEALD and PECVD method Electricity 24 Active
US10361076B2 Gapfill of variable aspect ratio features with a composite PEALD and PECVD method Electricity 15 Active
US6211008A Method for forming high-density high-capacity capacitor Electricity 14 Expired
US9138860B2 Closed-loop control for improved polishing pad profiles Performing Operations; Transporting 14 Active
US10062563B2 Selective atomic layer deposition with post-dose treatment Electricity 14 Active
US9793096B2 Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity Electricity 13 Active
US5849351A Water dispersible coating composition for fat-fried foods Human Necessities 13 Expired
US5976607A Water dispersible coating composition for fat-fried foods Human Necessities 11 Expired
US10559468B2 Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Electricity 11 Active
US9797042B2 Single ALD cycle thickness control in multi-station substrate deposition systems Electricity 10 Active
US7840375B2 Methods and apparatus for generating a library of spectra Electricity 9 Active
US10339465B2 Optimized decision tree based models Physics 9 Active
US9617638B2 Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system Electricity 8 Active
US10679848B2 Selective atomic layer deposition with post-dose treatment Electricity 8 Active
US10566187B2 Ultrathin atomic layer deposition film accuracy thickness control Electricity 8 Active
US6928626B1 System and method for modeling of circuit components Physics 8 Expired
US7444198B2 Determining physical property of substrate Physics 7 Active
US9870917B2 Variable temperature hardware and methods for reduction of wafer backside deposition Electricity 7 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.