Patent · US Active

Wavefront correction element for use in an optical system

US10151922B2 · kind B2 · utility

1Cited by

2References

18Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Matus Banyay · Cologne, DE
Martin Weiser · Sinsheim, DE
Boris Bittner · Roth, DE

Key dates

Filing date	Oct 20, 2017
Grant date	Dec 11, 2018
Priority date	—
Expiry date	Oct 20, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/0903
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A wavefront correction element for an optical system, in particular an optical system of a microlithographic projection exposure apparatus or a mask inspection apparatus, has a carrier film (110, 210, 410) which at least partly transmits electromagnetic radiation that has an operating wavelength of the optical system and that impinges on the carrier film during operation of the optical system. The carrier film (110, 210, 410) is configured such that the real part of the complex refractive index of the carrier film varies over a used region of the surface of the carrier film (110, 210, 410).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.